JPH0534103Y2 - - Google Patents
Info
- Publication number
- JPH0534103Y2 JPH0534103Y2 JP2787387U JP2787387U JPH0534103Y2 JP H0534103 Y2 JPH0534103 Y2 JP H0534103Y2 JP 2787387 U JP2787387 U JP 2787387U JP 2787387 U JP2787387 U JP 2787387U JP H0534103 Y2 JPH0534103 Y2 JP H0534103Y2
- Authority
- JP
- Japan
- Prior art keywords
- fluid passage
- insulating material
- heat insulating
- heating furnace
- buffer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims description 16
- 239000011810 insulating material Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 6
- 239000012809 cooling fluid Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000012774 insulation material Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000002791 soaking Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2787387U JPH0534103Y2 (en]) | 1987-02-26 | 1987-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2787387U JPH0534103Y2 (en]) | 1987-02-26 | 1987-02-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63136326U JPS63136326U (en]) | 1988-09-07 |
| JPH0534103Y2 true JPH0534103Y2 (en]) | 1993-08-30 |
Family
ID=30830311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2787387U Expired - Lifetime JPH0534103Y2 (en]) | 1987-02-26 | 1987-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534103Y2 (en]) |
-
1987
- 1987-02-26 JP JP2787387U patent/JPH0534103Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63136326U (en]) | 1988-09-07 |
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